Bottom Electrode Effects on Piezoelectricity of Pb(Zr<sub>0.52</sub>,Ti<sub>0.48</sub>)O<sub>3</sub> Thin Film in Flexible Sensor Applications

Bottom Electrode Effects on Piezoelectricity of Pb(Zr<sub>0.52</sub>,Ti<sub>0.48</sub>)O<sub>3</sub> Thin Film in Flexible Sensor Applications

Piezoelectric thin films grown on a mechanical, flexible mica substrate have gained significant attention for their ability to convert mechanical deformation into electrical energy though a curved surface. To extract the generated charge from the PZT thin films, bottom electrodes are typically grown...

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Bibliographic Details
Main Authors: Yanling Yuan, Ling Gao, Naixin Li, Jiuning Gao, Yu Yan, Yiming Zhao, Zongqiang Ren, Hongxin Gong, Yunfei Zhang, Yongbin Liu, Ming Wu, Lisheng Zhong
Format: Article
Language:English
Published: MDPI AG 2023-12-01
Series:Materials
Subjects:
PZT
piezoelectric effect
flexible sensor
ferroelectric thin film
Online Access:https://www.mdpi.com/1996-1944/16/23/7470

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https://www.mdpi.com/1996-1944/16/23/7470

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