An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head
In view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model is established based on the analy...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-11-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/10/11/1267 |