An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head
In view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model is established based on the analy...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-11-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/10/11/1267 |
| _version_ | 1797458020561584128 |
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| author | Yao Huang Shuangliang Che Weibin Zhu Cheng Ma Yi Zhou Wei Zou Zi Xue |
| author_facet | Yao Huang Shuangliang Che Weibin Zhu Cheng Ma Yi Zhou Wei Zou Zi Xue |
| author_sort | Yao Huang |
| collection | DOAJ |
| description | In view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model is established based on the analysis of the principle of the rotary table; thereby, the influence of eccentricity error on the phase feature of the moiré signal in the rotation course of the rotary table is clarified, and the corresponding model between the phase feature spectral components and the eccentricity error is established. The verification experiments of the proposed method are carried out based on the laboratory-made circuit system. After verifying the accuracy of the data acquisition of the laboratory-made circuit board, the verification experiments of the eccentricity error separation effect of the proposed method are carried out. The experimental data are compared with those of the traditional method, and the results show that the error between the two methods is 2.34 μm, while the relative error is 2.3%. |
| first_indexed | 2024-03-09T16:31:06Z |
| format | Article |
| id | doaj.art-1eb1dda4af754de5a1f7a1f441efae5a |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-09T16:31:06Z |
| publishDate | 2023-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj.art-1eb1dda4af754de5a1f7a1f441efae5a2023-11-24T15:01:39ZengMDPI AGPhotonics2304-67322023-11-011011126710.3390/photonics10111267An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading HeadYao Huang0Shuangliang Che1Weibin Zhu2Cheng Ma3Yi Zhou4Wei Zou5Zi Xue6State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaState Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, ChinaSchool of Measurement and Testing Engineering, China Jiliang University, Hangzhou 310018, ChinaSchool of Measurement and Testing Engineering, China Jiliang University, Hangzhou 310018, ChinaSchool of Measurement and Testing Engineering, China Jiliang University, Hangzhou 310018, ChinaNational Institute of Metrology, China, Beijing 100029, ChinaNational Institute of Metrology, China, Beijing 100029, ChinaIn view of the limitations of the existing eccentricity error separation method of the rotary table, an eccentricity error separation method based on the phase feature of the moiré signal of a single reading head is proposed herein. A grating pair transmission model is established based on the analysis of the principle of the rotary table; thereby, the influence of eccentricity error on the phase feature of the moiré signal in the rotation course of the rotary table is clarified, and the corresponding model between the phase feature spectral components and the eccentricity error is established. The verification experiments of the proposed method are carried out based on the laboratory-made circuit system. After verifying the accuracy of the data acquisition of the laboratory-made circuit board, the verification experiments of the eccentricity error separation effect of the proposed method are carried out. The experimental data are compared with those of the traditional method, and the results show that the error between the two methods is 2.34 μm, while the relative error is 2.3%.https://www.mdpi.com/2304-6732/10/11/1267rotary tableeccentricity errormoiré signalphase feature |
| spellingShingle | Yao Huang Shuangliang Che Weibin Zhu Cheng Ma Yi Zhou Wei Zou Zi Xue An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head Photonics rotary table eccentricity error moiré signal phase feature |
| title | An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head |
| title_full | An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head |
| title_fullStr | An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head |
| title_full_unstemmed | An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head |
| title_short | An Eccentricity Error Separation Method for Rotary Table Based on Phase Feature of Moiré Signal of Single Reading Head |
| title_sort | eccentricity error separation method for rotary table based on phase feature of moire signal of single reading head |
| topic | rotary table eccentricity error moiré signal phase feature |
| url | https://www.mdpi.com/2304-6732/10/11/1267 |
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