Effect of external magnetic field on the preparation of nitrogen-doped diamond-like carbon films
Nitrogen-doped diamond-like carbon (DLC) films were prepared on quartz substrates and silicon wafers using the radio-frequency magnetron sputtering technique with high-purity graphite as the target material. Simultaneously, a permanent NdFeB magnet was placed on the substrate site to study the effec...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-07-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0153496 |