Overcoming sheaths overlapping in a small diameter metallic tube with one end closed and using a high density plasma from a high power pulsed hollow cathode discharge
High voltage sheaths are formed when plasmas are produced by application of high negative voltage pulses to conductive supports or components, as in Plasma Immersion Ion Implantation (PIII) treatments of materials surfaces. For parts with concave shape, as inside metal tubes, these sheaths behave qu...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-08-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5040588 |