Research on Fabrication of Phononic Crystal Soft-Supported Graphene Resonator

In aviation, aerospace, and other fields, nanomechanical resonators could offer excellent sensing performance. Among these, graphene resonators, as a new sensitive unit, are expected to offer very high mass and force sensitivity due to their extremely thin thickness. However, at present, the quality...

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Bibliographic Details
Main Authors: Xiande Zheng, Ying Liu, Jiapeng Zhen, Jing Qiu, Guanjun Liu
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/14/2/130