Spectral Characteristics of DC Short Glow Discharge Plasma With Grid Electrodes
The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250–400 V and a helium pressure of 3&...
Main Authors: | , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2023-01-01
|
Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/10050508/ |