Spectral Characteristics of DC Short Glow Discharge Plasma With Grid Electrodes
The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250–400 V and a helium pressure of 3&...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10050508/ |
| Summary: | The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250–400 V and a helium pressure of 3–15 Torr and a discharge gap of 3 mm. The results indicate that the intensity distribution of helium atom spectral lines in the post-cathode space differs from that in the post-anode space. The temperature of electron excitation in the post-cathode plasma reaches its peak of 1500–3000K at 5–6 mm from the grid cathode. The difference in the intensity distributions of helium atom spectral lines in the post-cathode and post-anode spaces is associated with electron generation mechanism in these cases. |
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| ISSN: | 2169-3536 |