Effect of Carrier Gas Flow Rates on the Structural and Optical Properties of ZnO Films Deposited Using an Aerosol Deposition Technique

Aerosol deposition (AD) is a simple, dry raw-powder deposition process in which the targeted film is formed by direct bombardment of accelerated starting powder onto the substrate surface at room temperature. Despite the increased interest in AD film formation, no work has been completed to systemat...

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Bibliographic Details
Main Authors: May Zin Toe, Wai Kian Tan, Hiroyuki Muto, Go Kawamura, Atsunori Matsuda, Khatijah Aisha Binti Yaacob, Swee-Yong Pung
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Electronic Materials
Subjects:
Online Access:https://www.mdpi.com/2673-3978/3/4/27