Laser planarization efficiency and roughness of CVD diamond film

Laser planarization efficiency and roughness of CVD diamond film

The orthogonal experiment of laser planarization of CVD polycrystalline diamond film was carried out, and the morphology was analyzed by using scanning electron microscope (SEM). The surface roughness Ra, the surface roughness Sa and the taper of kerf were measured by confocal laser scanning microsc...

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Bibliographic Details
Main Authors: Shiyu LI, Kang AN, Siwu SHAO, Yabo HUANG, Jianjun ZHANG, Yuting ZHENG, Liangxian CHEN, Junjun WEI, Jinlong LIU, Chengming LI
Format: Article
Language:zho
Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2022-02-01
Series:Jin'gangshi yu moliao moju gongcheng
Subjects:
cvd diamond film
laser planarization
surface roughness
mechanical grinding
Online Access:http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0104

Internet

http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0104

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