Technology theme mining of integrated circuit manufacturing industry chain based on patents
Excavate and compare the technical themes of IC manufacturing industry chain of domestic and foreign patents, so as to objectively and comprehensively reveal the technical themes and differences of IC manufacturing in domestic and foreign, hoping to provide valuable reference for domestic IC manufac...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2022-01-01
|
| Series: | SHS Web of Conferences |
| Online Access: | https://www.shs-conferences.org/articles/shsconf/pdf/2022/10/shsconf_iteme2022_01022.pdf |