Energy beam-based direct and assisted polishing techniques for diamond: A review

Diamond is a highly valuable material with diverse industrial applications, particularly in the fields of semiconductor, optics, and high-power electronics. However, its high hardness and chemical stability make it difficult to realize high-efficiency and ultra-low damage machining of diamond. To ad...

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Bibliographic Details
Main Authors: Zhuo Li, Feng Jiang, Zhengyi Jiang, Zige Tian, Tian Qiu, Tao Zhang, Qiuling Wen, Xizhao Lu, Jing Lu, Hui Huang
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:International Journal of Extreme Manufacturing
Subjects:
Online Access:https://doi.org/10.1088/2631-7990/acfd67