Two-dimensional grating interferometer with nanometer accuracy

A two-dimensional grating interferometer with the nanometer accuracy is proposed, which employs a transmissive two-dimensional diffraction grating and a corner cube prism in its optical configuration. The distinctive features of this optical path configuration are as follows: (i) Fourfold optical su...

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Bibliographic Details
Main Authors: Yaowen Ban, Guobo Zhao, Hui Liu, Zhenghui Zhang, Bangdao Chen, Bingheng Lu, Hongzhong Liu
Format: Article
Language:English
Published: AIP Publishing LLC 2023-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0179173