Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission ima...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2013-07-01
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Series: | Materials |
Subjects: | |
Online Access: | http://www.mdpi.com/1996-1944/6/8/3160 |