Highly efficient and aberration-free off-plane grating spectrometer and monochromator for EUV—soft X-ray applications

Highly efficient and aberration-free off-plane grating spectrometer and monochromator for EUV—soft X-ray applications

Abstract We demonstrate a novel flat-field, dual-optic imaging EUV—soft X-ray spectrometer and monochromator that attains an unprecedented throughput efficiency exceeding 60% by design, along with a superb spectral resolution of λ/Δλ > 200 accomplished without employing variable line spacing grat...

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Bibliographic Details
Main Authors: Jie Li, Kui Li, Xiaoshi Zhang, Dimitar Popmintchev, Hao Xu, Yutong Wang, Ruixuan Li, Guangyin Zhang, Jiyue Tang, Jin Niu, Yongjun Ma, Runyu Meng, Changjun Ke, Jisi Qiu, Yunfeng Ma, Tenio Popmintchev, Zhongwei Fan
Format: Article
Language:English
Published: Nature Publishing Group 2024-01-01
Series:Light: Science & Applications
Online Access:https://doi.org/10.1038/s41377-023-01342-9

Internet

https://doi.org/10.1038/s41377-023-01342-9

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