Combinatorial Synthesis of AlTiN Thin Films
Nitrides of aluminum (Al) and titanium (Ti) mixtures have long been studied and used as commercial coatings because of their high hardness and high oxidation resistance due to the formation of an alumina layer on the coating surface. To fully understand the contribution of Al and Ti to the propertie...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Plasma |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2571-6182/6/2/17 |