Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings

Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings

Abstract This work presents a multi-degrees-of-freedom motion parameter measurement method based on the use of cross-coupling diffraction gratings that were prepared on the two sides of a polydimethylsiloxane (PDMS) substrate using oxygen plasma processing technology. The laser beam that travels pas...

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Bibliographic Details
Main Authors: Junping Duan, Qiang Zhu, Kun Qian, Hao Guo, Binzhen Zhang
Format: Article
Language:English
Published: SpringerOpen 2017-08-01
Series:Nanoscale Research Letters
Subjects:
Cross coupling diffraction gratings
Multi-degrees of freedom
Motion parameter measurement
PDMS
Online Access:http://link.springer.com/article/10.1186/s11671-017-2289-0

Internet

http://link.springer.com/article/10.1186/s11671-017-2289-0

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