A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation
The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/3/1129 |