Development of the multi-directional ablation process using the femtosecond laser to create a pattern on the lateral side of a 3D microstructure
Abstract Two-photon stereolithography (TPS) is widely used for the fabrication of various three–dimensional (3D) structures with sub-micron fabrication resolution in a single fabrication process. However, TPS is unsuitable for microstructures with fine-hole patterns. The laser ablation process can b...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-03-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-023-32030-8 |