Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different locations of pitches in the mask to make a consiste...

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Bibliographic Details
Main Authors: Dongxu Ren, Huiying Zhao, Chupeng Zhang, Daocheng Yuan, Jianpu Xi, Xueliang Zhu, Xinxing Ban, Longchao Dong, Yawen Gu, Chunye Jiang
Format: Article
Language:English
Published: MDPI AG 2016-04-01
Series:Sensors
Subjects:
projection lithography
linear scale
linear displacement sensor
multi-repeated method
average homogenization effect
Online Access:http://www.mdpi.com/1424-8220/16/4/538

Internet

http://www.mdpi.com/1424-8220/16/4/538

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