Analysis of substrate curvature and film stress through a reformed mathematical description on mismatch strain
Stoney’s formula first related film stress to substrate curvature, but properties of film material were not contained in it, which was modified by Freund’s formula. In the derivation of Freund’s formula, a uniformly preassigned mismatch strain throughout film was adopted. For the epitaxial growth of...
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2018-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5033950 |