Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold...

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Bibliographic Details
Main Authors: Quanquan Sun, Jiaxuan Tang, Lifeng Shen, Jie Lan, Zhenfeng Shen, Junfeng Xiao, Xiao Chen, Jianguo Zhang, Yu Wu, Jianfeng Xu, Xuefang Wang
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Micromachines
Subjects:
silicon spherical microlens array
hot embossing
mold anti-sticking
ICP etching
Online Access:https://www.mdpi.com/2072-666X/13/6/899

Internet

https://www.mdpi.com/2072-666X/13/6/899

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