Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators
Film bulk acoustic resonator (FBAR)-based filters have attracted great attention because they can be used to build high-performance RF filters with low cost and small device size. Generally, FBARs employ the air cavity and Bragg mirror to confine the acoustic energy within the piezoelectric layer, s...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/11/10/2547 |