Is chemical vapor deposition of monolayer WSe2 comparable to other synthetic routes?
Chemical vapor deposition (CVD) can produce wafer-scale transition-metal dichalcogenide (TMD) monolayers for the integration of electronic and optoelectronic devices. Nonetheless, the material quality of the CVD-grown TMDs still remains controversial. Here, we compare the quality of representative W...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-11-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0175469 |