Experimental Characterization of a Thermopile with Aluminum-n-type Polysilicon Junctions as a Base for Multi-directional Flow Sensor Implemented in a Silicon Chip
A multi-directional flow sensor has been realized. The essential part of the considered sensor is a thermopile configuration, which enables the measurement of the flow speed and the flow direction. The thermopile is a series arrangement of eight thermocouples. A thermocouple converts a difference in...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
ITB Journal Publisher
2007-11-01
|
| Series: | ITB Journal of Engineering Science |
| Subjects: | |
| Online Access: | http://journal.itb.ac.id/download.php?file=B07051.pdf&id=202&up=7 |