APA (7th ed.) Citation

Zhou, Y., Gu, Y., & Zhang, S. (2022). Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection. MDPI AG.

Chicago Style (17th ed.) Citation

Zhou, Yongxin, Yuandong Gu, and Songsong Zhang. Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection. MDPI AG, 2022.

MLA (9th ed.) Citation

Zhou, Yongxin, et al. Nondestructive Wafer Level MEMS Piezoelectric Device Thickness Detection. MDPI AG, 2022.

Warning: These citations may not always be 100% accurate.