Thermal feature-size enhancement in multiphoton photoresists

Thermal feature-size enhancement in multiphoton photoresists

We demonstrate a new approach for decreasing the feature size in multiphoton absorption polymerization (MAP). Acrylic photoresists containing the photoinitiator KL68 (bis-[4-(diphenylamino) stryl]-1-(2-ethylhexyloxy), 4-(methoxy)benzene) exhibit a proportional velocity (PROVE) dependence, yielding s...

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Bibliographic Details
Main Authors: Nikolaos Liaros, Zuleykhan Tomova, Sandra A. Gutierrez Razo, John S. Bender, Amanda J. Souna, Robert J. Devoe, David A. Ender, Brian J. Gates, John T. Fourkas
Format: Article
Language:English
Published: Frontiers Media S.A. 2022-10-01
Series:Frontiers in Nanotechnology
Subjects:
multiphoton absorption polymerization
photopolymerization
resolution enhancement
thermal effects
proportional velocity dependence
Online Access:https://www.frontiersin.org/articles/10.3389/fnano.2022.988997/full

Internet

https://www.frontiersin.org/articles/10.3389/fnano.2022.988997/full

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