Effect of Annealing on the Thermoelectricity Properties of the WRe26-In<sub>2</sub>O<sub>3</sub> Thin Film Thermocouples

Effect of Annealing on the Thermoelectricity Properties of the WRe26-In<sub>2</sub>O<sub>3</sub> Thin Film Thermocouples

WRe26-In<sub>2</sub>O<sub>3</sub> (WRe26 (tungsten-26% rhenium) and In<sub>2</sub>O<sub>3</sub> thermoelectric materials) thin film thermocouples (TFTCs) have been fabricated based on magnetron sputtering technology, which can be used in temperature me...

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Bibliographic Details
Main Authors: Bian Tian, Yan Liu, Zhongkai Zhang, Zhaojun Liu, Libo Zhao, Qijing Lin, Peng Shi, Qi Mao, Dejiang Lu, Zhuangde Jiang
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Micromachines
Subjects:
WRe26-In<sub>2</sub>O<sub>3</sub> thin films
thermocouples
annealing
magnetron sputtering
Online Access:https://www.mdpi.com/2072-666X/11/7/664

Internet

https://www.mdpi.com/2072-666X/11/7/664

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