An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure
Abstract Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-17209-9 |