An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure
Abstract Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-08-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-17209-9 |
| _version_ | 1811320868876320768 |
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| author | Wenpeng Fu Chenyang Zhao Wen Xue Changlin Li |
| author_facet | Wenpeng Fu Chenyang Zhao Wen Xue Changlin Li |
| author_sort | Wenpeng Fu |
| collection | DOAJ |
| description | Abstract Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is proposed which is based on the idea of a strong mathematical mapping relationship that may exist between microstructure surface topography features and the corresponding image pixel intensities. In this work, a series of microgrooves are ultra-precision machined and their surface topographies and images are measured. A mapping relationship model is established to analyze the effect of the microgroove surface topography on the imaging mechanism. The results show that the surface roughness and surface defects of the microgroove have significant effects on predicting the imaging mechanism. The optimized machining parameters are determined afterward. This paper demonstrates a feasible and valuable work to support the design and manufacture super-resolution microstructure which has essential applications in precision positioning measurement. |
| first_indexed | 2024-04-13T13:07:07Z |
| format | Article |
| id | doaj.art-226386129034468fae5d4de2a6c28700 |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-04-13T13:07:07Z |
| publishDate | 2022-08-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-226386129034468fae5d4de2a6c287002022-12-22T02:45:43ZengNature PortfolioScientific Reports2045-23222022-08-011211910.1038/s41598-022-17209-9An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructureWenpeng Fu0Chenyang Zhao1Wen Xue2Changlin Li3School of Mechanical Engineering and Automation, Harbin Institute of TechnologySchool of Mechanical Engineering and Automation, Harbin Institute of TechnologySchool of Mechanical Engineering and Automation, Harbin Institute of TechnologySchool of Mechanical Engineering and Automation, Harbin Institute of TechnologyAbstract Vision-based precision measurement is limited by the optical resolution. Although various super-resolution algorithms have been developed, measurement precision and accuracy are difficult to guarantee. To achieve nanoscale resolution measurement, a super-resolution microstructure concept is proposed which is based on the idea of a strong mathematical mapping relationship that may exist between microstructure surface topography features and the corresponding image pixel intensities. In this work, a series of microgrooves are ultra-precision machined and their surface topographies and images are measured. A mapping relationship model is established to analyze the effect of the microgroove surface topography on the imaging mechanism. The results show that the surface roughness and surface defects of the microgroove have significant effects on predicting the imaging mechanism. The optimized machining parameters are determined afterward. This paper demonstrates a feasible and valuable work to support the design and manufacture super-resolution microstructure which has essential applications in precision positioning measurement.https://doi.org/10.1038/s41598-022-17209-9 |
| spellingShingle | Wenpeng Fu Chenyang Zhao Wen Xue Changlin Li An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure Scientific Reports |
| title | An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure |
| title_full | An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure |
| title_fullStr | An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure |
| title_full_unstemmed | An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure |
| title_short | An investigation of the influence of microstructure surface topography on the imaging mechanism to explore super-resolution microstructure |
| title_sort | investigation of the influence of microstructure surface topography on the imaging mechanism to explore super resolution microstructure |
| url | https://doi.org/10.1038/s41598-022-17209-9 |
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