Silicon Oxynitride Thin Film Coating to Lossy Mode Resonance Fiber-Optic Refractometer
A fiber-optic refractometer for various liquids with refractive indices in the range from 1.33 to 1.43 has been manufactured and tested. The sensor is based on a thin silicon oxynitride (Si<sub>3</sub>N<sub>4-x</sub>O<sub>x</sub>) film coated thinned optic fiber s...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/10/3665 |