RAMAN SCATTERING IN CONDENSATE PRODUCTS OF ION-BEAM AND MAGNETRON SPUTTERING OF GRAPHITE

RAMAN SCATTERING IN CONDENSATE PRODUCTS OF ION-BEAM AND MAGNETRON SPUTTERING OF GRAPHITE

There has been a spectroscopic analysis of Raman scattering and an analysis of atomic-force microscopyfor disordered carbon thin films vacuum-deposited on silicon substrate using scattering of graphite target. The comparative experiments and evaluations were done under different conditions both usin...

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Detalhes bibliográficos
Principais autores: Evgheny F. Shevchenko, Igor A. Sysoev, Fedor F. Malyavin
Formato: Artigo
Idioma:Russian
Publicado em: North Caucasus Federal University 2022-05-01
coleção:Вестник Северо-Кавказского федерального университета
Assuntos:
комбинационное рассеивание света
магнетронное распыление
ионно-лучевое распыление
осаждение тонких пленок
разупорядоченный углерод
наноуглерод
асм
raman scattering
magnetron sputtering
ion-beam sputtering
thin film depositing
disordered carbon
nanocarbon
afm
Acesso em linha:https://vestnikskfu.elpub.ru/jour/article/view/1745

Internet

https://vestnikskfu.elpub.ru/jour/article/view/1745

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