SOME EXPERIMENTS REGARDING MAGNETRON SPUTTERING DEPOSITION WITH SMALL CAPACITY DEVICES
In this paper the authors describe the testing of electric devices and magnetic components which should be used to set up a magnetron sputtering system. The results of tests are presented in the form of micro and nanoscopic analysis made with optical and atomic force microscopy. The experimental in...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Editura Politehnica, Timisoara
2018-12-01
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| Series: | Nonconventional Technologies Review |
| Subjects: | |
| Online Access: | http://www.revtn.ro/index.php/revtn/article/view/54 |