Serially connected tantalum and amorphous indium tin oxide for sensing the temperature increase in IGZO thin-film transistor backplanes

Serially connected tantalum and amorphous indium tin oxide for sensing the temperature increase in IGZO thin-film transistor backplanes

A temperature sensor embedded in an In-Ga-Zn oxide (IGZO) TFT was evaluated after fabrication to facilitate monitoring of the temperature distribution on a thin-film transistor (TFT) array. Because the proposed temperature sensor uses the same material as the TFT, no additional process or material i...

Full description

Bibliographic Details
Main Authors: EunSeong Yu, SeoungGyun Kim, SeoJin Kang, HyuckSu Lee, SeungJae Moon, JongMo Lee, SeungBae An, ByungSeong Bae
Format: Article
Language:English
Published: Taylor & Francis Group 2023-07-01
Series:Journal of Information Display
Subjects:
Thin-film
temperature sensor
display
ITO
metal
Online Access:https://www.tandfonline.com/doi/10.1080/15980316.2023.2185563

Internet

https://www.tandfonline.com/doi/10.1080/15980316.2023.2185563

Similar Items