Sputtering Deposition of TiO<sub>2</sub> Thin Film Coatings for Fiber Optic Sensors
Thin films of titanium dioxide (TiO<sub>2</sub>) and titanium (Ti) were deposited onto glass and optical fiber supports through DC magnetron sputtering, and their transmission was characterized with regard to their use in optical fiber-based sensors. Deposition parameters such as oxygen...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-05-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/9/5/342 |