Study on the Simulation and Experimental Impact of Substrate Holder Design on 3-Inch High-Quality Polycrystalline Diamond Thin Film Growth in a 2.45 GHz Resonant Cavity MPCVD

Study on the Simulation and Experimental Impact of Substrate Holder Design on 3-Inch High-Quality Polycrystalline Diamond Thin Film Growth in a 2.45 GHz Resonant Cavity MPCVD

In this study, three different substrate holder shapes—trapezoidal, circular frustum, and adjustable cyclic—were designed and optimized to enhance the quality of polycrystalline diamond films grown using microwave plasma chemical vapor deposition (MPCVD). Simulation results indicate that altering th...

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Bibliographic Details
Main Authors: Shuai Wu, Kesheng Guo, Jie Bai, Jiafeng Li, Jingming Zhu, Lei Liu, Lei Huang, Chuandong Zhang, Qiang Wang
Format: Article
Language:English
Published: MDPI AG 2024-09-01
Series:Crystals
Subjects:
2.45 GHz
MPCVD
polycrystalline diamond thin film
design of substrate holder
numerical simulation
Online Access:https://www.mdpi.com/2073-4352/14/9/821

Internet

https://www.mdpi.com/2073-4352/14/9/821

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