A Study of Ta<sub>2</sub>O<sub>5</sub> Nanopillars with Ni Tips Prepared by Porous Anodic Alumina Through-Mask Anodization
The paper discusses the formation of Ta<sub>2</sub>O<sub>5</sub> pillars with Ni tips during thin porous anodic alumina through-mask anodization on Si/SiO<sub>2</sub> substrates. The tantalum nanopillars were formed through porous masks in electrolytes of phosphor...
Main Authors: | , , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-04-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/8/1344 |