STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY
In this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2014-10-01
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| Series: | Acta Polytechnica |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/ap/article/view/2147 |