STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY
In this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2014-10-01
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| Series: | Acta Polytechnica |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/ap/article/view/2147 |
| _version_ | 1818989419782209536 |
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| author | Mária Domonkos Tibor Ižák Lucie Štolcová Jan Proška Pavel Demo Alexander Kromka |
| author_facet | Mária Domonkos Tibor Ižák Lucie Štolcová Jan Proška Pavel Demo Alexander Kromka |
| author_sort | Mária Domonkos |
| collection | DOAJ |
| description | In this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma using different plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of processed diamond films is characterized by scanning electron microscopy and atomic force microscope. The potential applications of such diamond structures in various fields of nanotechnology are also briefly discussed. |
| first_indexed | 2024-12-20T19:38:11Z |
| format | Article |
| id | doaj.art-23bf1a547cd3434eb3bd0d1538a432c3 |
| institution | Directory Open Access Journal |
| issn | 1210-2709 1805-2363 |
| language | English |
| last_indexed | 2024-12-20T19:38:11Z |
| publishDate | 2014-10-01 |
| publisher | CTU Central Library |
| record_format | Article |
| series | Acta Polytechnica |
| spelling | doaj.art-23bf1a547cd3434eb3bd0d1538a432c32022-12-21T19:28:36ZengCTU Central LibraryActa Polytechnica1210-27091805-23632014-10-0154532032410.14311/AP.2014.54.03202129STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHYMária Domonkos0Tibor Ižák1Lucie Štolcová2Jan Proška3Pavel Demo4Alexander Kromka5Institute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 PrahaInstitute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 PrahaDepartment of Physical Electronics, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehová 7, 115 19 PrahaDepartment of Physical Electronics, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehová 7, 115 19 PrahaDepartment of Physics, Faculty of Civil Engineering, Czech Technical University in Prague, Thákurova 7, 166 29 Praha 6Institute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 PrahaIn this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma using different plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of processed diamond films is characterized by scanning electron microscopy and atomic force microscope. The potential applications of such diamond structures in various fields of nanotechnology are also briefly discussed.https://ojs.cvut.cz/ojs/index.php/ap/article/view/2147 |
| spellingShingle | Mária Domonkos Tibor Ižák Lucie Štolcová Jan Proška Pavel Demo Alexander Kromka STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY Acta Polytechnica |
| title | STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY |
| title_full | STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY |
| title_fullStr | STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY |
| title_full_unstemmed | STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY |
| title_short | STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY |
| title_sort | structuring of diamond films using microsphere lithography |
| url | https://ojs.cvut.cz/ojs/index.php/ap/article/view/2147 |
| work_keys_str_mv | AT mariadomonkos structuringofdiamondfilmsusingmicrospherelithography AT tiborizak structuringofdiamondfilmsusingmicrospherelithography AT luciestolcova structuringofdiamondfilmsusingmicrospherelithography AT janproska structuringofdiamondfilmsusingmicrospherelithography AT paveldemo structuringofdiamondfilmsusingmicrospherelithography AT alexanderkromka structuringofdiamondfilmsusingmicrospherelithography |