Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates

Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates

The realization of a c-axis oriented aluminum nitride thick film on aluminum substrates is a promising step in the development of transducers for applications with a working temperature up to about 600 °C. The present paper deals with the realization of AlN thick films by means of reactive magnetron...

Full description

Bibliographic Details
Main Authors: Daniele Desideri, Enrico Bernardo, Alain Jody Corso, Federico Moro, Maria Guglielmina Pelizzo
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Materials
Subjects:
AC conductivity
<i>ε</i><sub>33</sub> permittivity
aluminum nitride
d<sub>31</sub> piezoelectric coefficient
magnetron sputtering
thick film
Online Access:https://www.mdpi.com/1996-1944/15/6/2090

Internet

https://www.mdpi.com/1996-1944/15/6/2090

Similar Items