Towards sub-10 nm spatial resolution by tender X-ray ptychographic coherent diffraction imaging

Towards sub-10 nm spatial resolution by tender X-ray ptychographic coherent diffraction imaging

As the first experiment at BL10U in NanoTerasu, tender X-ray ptychographic coherent diffraction imaging (PCDI) was conducted using a photon energy of 3.5 keV. The ptychographic diffraction patterns from a 200 nm thick Ta test chart and a micrometer-sized particle of sulfurized polymer were collected...

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Bibliografiska uppgifter
Huvudupphovsmän: Nozomu Ishiguro, Fusae Kaneko, Masaki Abe, Yuki Takayama, Junya Yoshida, Taiki Hoshino, Shuntaro Takazawa, Hideshi Uematsu, Yuhei Sasaki, Naru Okawa, Keichi Takahashi, Hiroyuki Takizawa, Hiroyuki Kishimoto, Yukio Takahashi
Materialtyp: Artikel
Språk:English
Publicerad: IOP Publishing 2024-01-01
Serie:Applied Physics Express
Ämnen:
ptychographic coherent diffraction imaging
tender X-ray
synchrotron radiation
Länkar:https://doi.org/10.35848/1882-0786/ad4846

Internet

https://doi.org/10.35848/1882-0786/ad4846

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