A Comparative Study of Microstructure and Properties of Multicomponent Coatings Based On (TIZRSIY)N System Prepared by the Vacuum ARC Deposition
The effect of reaction gas (nitrogen) pressure on the structural-phase state and properties of vacuum-arc nitride coatings of (TiZrSiY)N system has been studied. On the surface of the coatings, a significant amount of the droplet fraction and solidified macroparticles of the sputtered cathode is obs...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
V.N. Karazin Kharkiv National University Publishing
2023-09-01
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Series: | East European Journal of Physics |
Subjects: | |
Online Access: | https://periodicals.karazin.ua/eejp/article/view/22134 |