A Comparative Study of Microstructure and Properties of Multicomponent Coatings Based On (TIZRSIY)N System Prepared by the Vacuum ARC Deposition

The effect of reaction gas (nitrogen) pressure on the structural-phase state and properties of vacuum-arc nitride coatings of (TiZrSiY)N system has been studied. On the surface of the coatings, a significant amount of the droplet fraction and solidified macroparticles of the sputtered cathode is obs...

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Bibliographic Details
Main Authors: Vyacheslav M. Beresnev, Serhii V. Lytovchenko, Mykola O. Azarenkov, Olga V. Maksakova, Denis V. Horokh, Bohdan O. Mazilin
Format: Article
Language:English
Published: V.N. Karazin Kharkiv National University Publishing 2023-09-01
Series:East European Journal of Physics
Subjects:
Online Access:https://periodicals.karazin.ua/eejp/article/view/22134

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