CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...

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Bibliographic Details
Main Authors: Matthias Schreiter, Inger Vikholm-Lundin, Dana Pitzer, Ann-Charlotte Hellgren, Sanna Auer, Kari Tukkiniemi, Arto Rantala, Martin Nirschl
Format: Article
Language:English
Published: MDPI AG 2010-04-01
Series:Sensors
Subjects:
FBAR
film bulk acoustic resonator
CMOS
DNA
thickness shear mode
TSM
label-free
biosensor
biomolecular interaction analysis
Online Access:http://www.mdpi.com/1424-8220/10/5/4180/

Internet

http://www.mdpi.com/1424-8220/10/5/4180/

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