CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...

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Bibliographic Details
Main Authors: Matthias Schreiter, Inger Vikholm-Lundin, Dana Pitzer, Ann-Charlotte Hellgren, Sanna Auer, Kari Tukkiniemi, Arto Rantala, Martin Nirschl
Format: Article
Language:English
Published: MDPI AG 2010-04-01
Series:Sensors
Subjects:
FBAR
film bulk acoustic resonator
CMOS
DNA
thickness shear mode
TSM
label-free
biosensor
biomolecular interaction analysis
Online Access:http://www.mdpi.com/1424-8220/10/5/4180/
Description
Summary:The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
ISSN:1424-8220

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