Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Autors principals: | , , , , , , , , , , , |
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Format: | Article |
Idioma: | English |
Publicat: |
American Chemical Society
2020-10-01
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Col·lecció: | ACS Omega |
Accés en línia: | https://doi.org/10.1021/acsomega.0c03865 |