Cita APA (7th ed.)

Tanide, A., Nakamura, S., Horikoshi, A., Takatsuji, S., Kimura, T., Kinose, K., . . . Hori, M. (2020). Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society.

Cita Chicago (17th ed.)

Tanide, Atsushi, et al. Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society, 2020.

Cita MLA (9th ed.)

Tanide, Atsushi, et al. Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society, 2020.