Tanide, A., Nakamura, S., Horikoshi, A., Takatsuji, S., Kimura, T., Kinose, K., . . . Hori, M. (2020). Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society.
Chicago-viite (17. p.)Tanide, Atsushi, et al. Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society, 2020.
MLA-viite (9. p.)Tanide, Atsushi, et al. Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources. American Chemical Society, 2020.
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