Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
Príomhchruthaitheoirí: | , , , , , , , , , , , |
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Formáid: | Alt |
Teanga: | English |
Foilsithe / Cruthaithe: |
American Chemical Society
2020-10-01
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Sraith: | ACS Omega |
Rochtain ar líne: | https://doi.org/10.1021/acsomega.0c03865 |
ISSN: | 2470-1343 |
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