Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources
| Автори: | , , , , , , , , , , , |
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| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
American Chemical Society
2020-10-01
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| Серія: | ACS Omega |
| Онлайн доступ: | https://doi.org/10.1021/acsomega.0c03865 |
| _version_ | 1828943773368844288 |
|---|---|
| author | Atsushi Tanide Shohei Nakamura Akira Horikoshi Shigeru Takatsuji Takahiro Kimura Kazuo Kinose Soichi Nadahara Masazumi Nishikawa Akinori Ebe Kenji Ishikawa Osamu Oda Masaru Hori |
| author_facet | Atsushi Tanide Shohei Nakamura Akira Horikoshi Shigeru Takatsuji Takahiro Kimura Kazuo Kinose Soichi Nadahara Masazumi Nishikawa Akinori Ebe Kenji Ishikawa Osamu Oda Masaru Hori |
| author_sort | Atsushi Tanide |
| collection | DOAJ |
| first_indexed | 2024-12-14T04:20:32Z |
| format | Article |
| id | doaj.art-245b6caa49c940b58b51a3d5470b652a |
| institution | Directory Open Access Journal |
| issn | 2470-1343 |
| language | English |
| last_indexed | 2024-12-14T04:20:32Z |
| publishDate | 2020-10-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj.art-245b6caa49c940b58b51a3d5470b652a2022-12-21T23:17:22ZengAmerican Chemical SocietyACS Omega2470-13432020-10-01541267762678510.1021/acsomega.0c03865Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma SourcesAtsushi Tanide0Shohei Nakamura1Akira Horikoshi2Shigeru Takatsuji3Takahiro Kimura4Kazuo Kinose5Soichi Nadahara6Masazumi Nishikawa7Akinori Ebe8Kenji Ishikawa9Osamu Oda10Masaru Hori11Rakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanRakusei Operation Center, SCREEN Holdings Co., Ltd., Kyoto, JapanEMD Corp, Yasu, Shiga, JapanEMD Corp, Yasu, Shiga, JapanCenter for Low-Temperature Plasma Sciences, Nagoya University, Nagoya, Aichi, JapanCenter for Low-Temperature Plasma Sciences, Nagoya University, Nagoya, Aichi, JapanCenter for Low-Temperature Plasma Sciences, Nagoya University, Nagoya, Aichi, Japanhttps://doi.org/10.1021/acsomega.0c03865 |
| spellingShingle | Atsushi Tanide Shohei Nakamura Akira Horikoshi Shigeru Takatsuji Takahiro Kimura Kazuo Kinose Soichi Nadahara Masazumi Nishikawa Akinori Ebe Kenji Ishikawa Osamu Oda Masaru Hori Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources ACS Omega |
| title | Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources |
| title_full | Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources |
| title_fullStr | Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources |
| title_full_unstemmed | Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources |
| title_short | Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources |
| title_sort | roles of atomic nitrogen hydrogen in gan film growth by chemically assisted sputtering with dual plasma sources |
| url | https://doi.org/10.1021/acsomega.0c03865 |
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